
Equipment and software upgrades are recommended process effeciencies and/or reduce product waste.
Standard upgrades offered include:
-
Classic TM to Envision TM hardware upgrades
-
Envision TM computer upgrade
-
9400PTX TM to 9400 DFM TM chamber upgrade
-
Brookside TM integration, tool monitoring
-
Real time wafer helium monitoring upgrade
-
Mechanical to Electro Static Chuck (ESC)
-
Mass Flow Controller (MFC) programming and re-sizing
-
Provide install services for all OEM released upgrades







