Equipment and software upgrades are recommended process effeciencies and/or reduce product waste.

Standard upgrades offered include:

• Classic ^TM to Envision ^TM hardware upgrades
• Envision ^TM computer upgrade
• 9400PTX ^TM to 9400 DFM ^TM chamber upgrade
• Brookside ^TM integration, tool monitoring
• Real time wafer helium monitoring upgrade
• Mechanical to Electro Static Chuck (ESC)
• Mass Flow Controller (MFC) programming and re-sizing
• Provide install services for all OEM released upgrades